Process gas components
Standard valve for process gas that uses a metal diaphragm. It supports many variations such as 3-way valves and 2-station 3-way valves as well as single unit and integrated types.
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[Standard] Durability: 1 million cycles (actual value: 4 million cycles) Supports integrated gas supply systems (1.5inch, 1.125inch)
[Improved inner seal performance] Reduced particle generation is achieved with optimal seal structure and improved surface roughness.
